Matsushita Electric Industrial Co., Ltd.

Yasuhiro Kametani

Kenji Takahashi

Shinji Kanayama

Hiroshi Wada

Kazushi Higashi

Shozo Minamitani

Kenji Okamoto

Saburo Kubota

Shinzo Eguchi

Makoto Akita

Takafumi Tsujisawa

Hirotaka Mega

When electrodes on an electronic component and electrode portions on a circuit board are joined via bumps with the electronic component and the circuit board vibrated respectively, a vibration damping detect device and a deciding device detect damping of the vibration caused by a progress of joining between the bumps and the electrode portions, and then determine a good or defective of the joining on a basis of the damping of the vibration. Further, regarding an impedance of an ultrasonic oscillator, a movement amount of a nozzle, or a current supplying to a VCM, these waveforms during the joining are compared with waveforms of good joining thereof and then the good or defective is determined. According to the above constructions, the good or defective of the joining between the electronic component and the circuit board can be determined during the joining. Further, when a joining state becomes wrong during the joining, the joining state can be changed. Thus generation of defective components is prevented and a yield can be improved.

Bump joining judging device and method, and semiconductor component production device and method

A bi-axial synchronous driving apparatus which includes: a set of motors for respectively driving two axes; rotation detecting devices for detecting rotational positions of the respective motors; a set of deviation counters to which a common position instruction signal and detection signals of the respective rotation detecting devices are applied; a correcting unit to which deviation signals outputted from the respective deviation counters are applied, so as to form correction signals with respect to the respective deviation signals based on an integration of a difference between each one of the deviation signals and the other corresponding deviation signal; a set of adding devices for adding the deviation signals outputted from the respective deviation counters to the correction signals; and a set of driving devices for driving the respective motors based on control signals outputted from said respective adding devices.

Bi-axial synchronous driving apparatus

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Tosashimizu, Japan

Yasuhiro Kametani