Tokuyama Soda Kabushiki Kaisha

Yasuhiro Kagiyama

Toru Nonaka

Koichi Doi

Yuji Ishiyama

Yoshihisa Yamamoto

Shigeo Komatsubara

Disclosed is a simple and convenient method by which a salt typified by sodium chloride, generally a neutral salt, is decomposed by using a three-compartment electrodialysis cell comprising a special ion-exchange membrane to form an acid and an alkali in high concentration at a high current efficiency.

Method of double decomposition of neutral salt

Disclosed is a process for washing a semiconductor substrate with an organic solvent, which comprises the first stage of supplying an organic solvent to be used for the organic solvent washing of a semiconductor substrate to a washing device and washing the semiconductor substrate, the second stage of supplying the organic solvent containing water, electrolytes and particulate or clustery suspended substances, which has been withdrawn from the first stage, to a pervaporation device and separating and removing mainly water, and the third stage of supplying the organic solvent withdrawn from the second stage to a distillation device to obtain the organic solvent as a distillate and recycling the distillate as the organic solvent to the first stage, the three stages being combined to form a continuous circulation systems.

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Tokuyama, Japan

Yasuhiro Kagiyama