Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Yasuhiro Joho

Yoshitaka Koyama

Hideto Yamaguchi

Hiroyuki Iwakura

Masanori Okuno

Junichi Kawasaki

Shinichiro Mori

Katsumi Takashima

Akihito Watanabe

Mitsuhiro Matsuda

Satomi Yamazaki

Ryo Yamaguchi

According to one aspect of a technique the present disclosure, there is provided a processing apparatus including: an apparatus controller including a memory storing apparatus data containing monitor data containing sensor information and an alarm indicating a failure detected based on the sensor information and an alarm analysis table containing analysis items. The apparatus controller is capable of outputting the alarm containing an alarm ID for specifying a type and an occurrence time of the alarm; specifying candidates of the analysis items from the alarm ID; acquiring monitor data corresponding to the candidates; determining a rank of the cause of the alarm according to a difference between monitor data at the occurrence time and a predetermined threshold value; and displaying a relationship between the monitor data and the threshold value. The display screen displays an occurrence history of the alarm and history of acquiring the monitor data.

Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

A teaching jig includes: a first plate that determines a substrate loading position in a forward/backward direction with respect to a substrate holder which holds a substrate; a second plate that determines the substrate loading position in a leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and movable in the forward/backward direction; and a positioning target pin installed in the first plate.

Teaching jig, substrate processing apparatus, and teaching method

There is provided a communication unit configured to receive monitor data showing a progress state of substrate processing or a state of substrate processing apparatus, from a substrate processing apparatus; a database part configured to readably store the monitor data received by the communication unit, in association with production information data; a file archive part configured to read the monitor data and the production information data from the database part, then create typical value data based on the monitor data, and prepare a file including the monitor data, the production information data, and the typical value data, and readably store this file; and a data searching part configured to receive an input of a prescribed searching condition to search the file, and display data stored in the file and matching with the searching condition, on a display unit.

Substrate processing system and group managing apparatus

There is provided a substrate processing system that can automatically inspect the operation of various kinds of parts of a semiconductor manufacturing apparatus without increasing the load of a main controller in the semiconductor manufacturing apparatus. In the substrate processing system of the present invention, inspection data of the semiconductor manufacturing apparatusunder operation are shared and collected online by a main controller, a data collection auxiliary computerand a data collecting computerthrough a network, and the operation state is collectively inspected by an inspecting computer

Substrate processing system and operation inspecting method

A centralized control apparatus includes a data collecting part that gathers data at a predetermined interval from a substrate processing apparatus for each component in the substrate processing apparatus; a data processing part that determines a status of each component based on the gathered data and regulation control information including attribute information about each component, maintenance information and previously established status-determined information about each component, at a predetermined timing established for each component, and performs thinning-out-processing to the gathered data on a determination result and prepares processed data by processing data obtained by the thinning-out-processing; and a data transmitting part that sends the regulation control information including the determination result and the processed data to a terminal unit.

Growing community of inventors

Toyama, Japan

Yasuhiro Joho