Seiko Epson Corporation

Yasuhiro Itayama

Motoki Takabe

Masao Nakayama

Takayuki Yonemura

Koji Sumi

Chikara Kojima

Toshihiro Shimizu

Eiju Hirai

Takanori Aimono

Harunobu Koike

Masanori Mikoshiba

Koji Ohashi

Yasuaki Hamada

Eiji Osawa

Tetsuya Isshiki

Naoto Yokoyama

Motohisa Noguchi

Xiaoxing Wang

Kenichi Kurokawa

Jingling Wang

Shunsuke Yoshida

A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

Method for producing piezoelectric actuator

A liquid ejecting head in which a first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated, a pressure chamber, which is partitioned by a partition wall, has an elongated shape, in a structure including the diaphragm and the piezoelectric element including an active portion and a non-active portion lateral direction, a first position is a position on an inner side of the active portion when viewed in the thickness direction, a second position is a position on an inner side of the non-active portion and closest to a boundary between the pressure chamber and the partition wall, and EI/EI≤40, wherein EIis a bending rigidity of the active portion at the first position and EIis a bending rigidity of the non-active portion at the second position.

Liquid ejecting head and liquid ejecting apparatus

A piezoelectric actuator includes, in a first direction in which pressure chambers are arranged side by side, an active portion in which a piezoelectric layer is sandwiched between a first electrode and a second electrode in a first area of a vibration plate corresponding to opposite ends of each pressure chamber and does not include the active portion in a second area of the vibration plate corresponding to a center of the pressure chamber. The vibration plate has, in the first direction, a thick-walled portion with a predetermined thickness in the first area and a thin-walled portion thinner than the thick-walled portion in the second area.

Liquid ejection head and liquid ejecting apparatus

A piezoelectric body layer of a first area has (100) plane preferential orientation, and a (100) plane orientation ratio of the piezoelectric body layer of a second area is lower than a (100) plane orientation ratio of the piezoelectric body layer of the first area, when one area far from an end portion of a second electrode is the first area, and one area near the end portion of the second electrode is the second area, of two areas of the second electrode in a second direction intersecting a first direction.

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method of manufacturing piezoelectric device

An electric current based on electric charge produced on the piezoelectric body changes by going through a first path, a second path, a third path, and a fourth path in this order. On the first path, the electric current becomes larger as the voltage becomes higher. On the second path, the electric current becomes smaller as the voltage becomes higher. On the third path, the electric current becomes larger as the voltage becomes higher. On the fourth path, the electric current becomes smaller as the voltage becomes higher.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers.

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and method for producing piezoelectric device

There is provided a piezoelectric element including: a substrate; a first electrode formed at a first substrate surface of the substrate in a first direction; a first piezoelectric layer that is formed at the first electrode and that includes a flat surface portion along the first substrate surface and an inclined surface portion inclined with respect to the flat surface portion; a second piezoelectric layer that is formed at the inclined surface portionand whose thickness is smaller than a thickness of the flat surface portion of the first piezoelectric layer; and a second electrode formed at at least the flat surface portion.

Piezoelectric element and liquid droplet ejection head

A liquid discharge head includes: a nozzle plate provided with a nozzle hole that discharges a liquid; a silicon substrate provided with a pressure chamber that is connected with the nozzle hole; a diaphragm provided on the silicon substrate; and a piezoelectric element that is provided on the diaphragm and that changes a volume of the pressure chamber, where: the diaphragm includes a zirconium oxide layer; the zirconium oxide layer has (&#x2212;111) preferred orientation; and in X-ray diffraction of the diaphragm, a difference between a position of (002) peak of the zirconium oxide layer and a position of (220) peak of the silicon substrate is 13.26&#xb0; or more and 13.30&#xb0; or less.

Liquid discharge head and printer

Provided is a liquid discharge head that includes a nozzle plate provided with a nozzle hole that discharges a liquid, a silicon substrate provided with a pressure generating chamber that communicates with the nozzle hole, a vibration plate provided on the silicon substrate, and a piezoelectric element that is provided on the vibration plate and changes a volume of the pressure generating chamber. The piezoelectric element includes a piezoelectric layer including a composite oxide of a perovskite structure containing lead, zirconium, and titanium. A difference between a peak position derived from a () surface of the piezoelectric layer and a peak position derived from a () surface of the silicon substrate in an X-ray diffraction of the piezoelectric layer is less than 25.00&#xb0;.

Provided is a piezoelectric device including: a substrate () on which a plurality of recesses () are provided; a vibrating plate () which is provided on one surface side of the substrate; and a piezoelectric element () which is provided over the vibrating plate () and on which a first electrode (), a piezoelectric layer (), and a second electrode () are laminated from the substrate () side, in which the first electrode () is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (), and the piezoelectric layer () is extended to the outer side of the first electrode () in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess () in the parallel arrangement direction, the vibrating plate () contains a zirconium oxide layer (), and when an area of the zirconium oxide layer () corresponding to the first electrode having the first width is set as a first area (p), areas of the zirconium oxide layer () corresponding to areas where the piezoelectric layer () is provided on the outer side of the first area (p) in the parallel arrangement direction are set as second areas (q), and areas of the zirconium oxide layer () corresponding to the recess () on the outer side of the second areas (q) in the parallel arrangement direction are set as third areas (r), the zirconium oxide layer () contains particulate crystal in the first area (p) at least on the first electrode () side in the thickness direction and contains columnar crystal in the third areas (r).

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of piezoelectric device

A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.

Piezoelectric element and piezoelectric element-based device

A piezoelectric element having a vibrating section including a vibrating plate, a first electrode, a piezoelectric layer, and a second electrode, in which a crystal orientation of a piezoelectric material forming the piezoelectric layer is (100) and a crystal structure of the piezoelectric material is a tetragonal crystal, and a total thickness Tof the vibrating plate and the first electrode and a total thickness Tof the piezoelectric layer and the second electrode have a relationship of T&#x2265;T.

Piezoelectric element and method for manufacturing same

A transmitting piezoelectric element and receiving piezoelectric elements and are arranged on a vibrating plate opposed to each opening of openings of a piezoelectric sensor, and, when an external force is applied in a vertical direction with respect to the vibrating plate opposed to the openings, a region which has a maximum principal stress which is a maximum value of the stress of the vibrating plate is a first region, and a region which has a minimum principal stress which is a minimum value of the stress of the vibrating plate is a second region, the receiving piezoelectric elements and are arranged in the first region and the transmitting piezoelectric element is arranged in the second region.

Piezoelectric sensor and piezoelectric device

A piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer provided between the first and second electrodes. In the piezoelectric element, the piezoelectric layer is made from a perovskite composite oxide represented by Pb(Ni, Nb, Zr, Ti)Oand the total of the Ni and Nb contents in the perovskite composite oxide is not less than 1 [mol %] and not more than 5 [mol %] based on a total content of elements contained in a B site.

Piezoelectric element and piezoelectric element-applied device

A liquid ejecting head includes a flow channel substrate and piezoelectric elements, with a diaphragm between the piezoelectric elements and the flow channel substrate. The flow channel substrate has pressure chambers lined up in a first direction with walls therebetween. Each piezoelectric element includes a first electrode, a piezoelectric layer and a second electrode. Each piezoelectric element has a piezoelectrically active portion, a region in which the piezoelectric layer is sandwiched between the first electrode and the second electrode, and are provided in regions facing the pressure chambers. The liquid ejecting head further includes holding members joined the diaphragm facing the walls using an adhesive agent. The width of the holding members is equivalent to or larger than the width of the walls. The width of an adhesive agent with which the holding members are joined to the diaphragm is equal to or smaller than the width of the walls.

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Chino, Japan

Yasuhiro Itayama