Kaijo Corporation

Yasuhiro Imazeki

Hiroshi Hasegawa

Junichiro Soejima

Akihisa Nakano

Tomoharu Kamamura

Shoji Yakuwa

An ultrasonic cleaning apparatus and an ultrasonic cleaning method for an edge face of a substrate help prevent re-contamination caused by splashing or the like of ultrasonic wave propagating water sprayed onto an edge face of an object to be cleaned. An ultrasonic wave transmitting tube provided to continue from the spot shower and configured to transmit and spray the ultrasonic wave propagating water to the substrate is provided, the ultrasonic wave transmitting tube is installed so as not to be positioned on the substrate, the substrate is retained so that the surface of the substrate assumes a horizontal state, and ultrasonic wave propagating water is sprayed to the edge face, which constitutes an outer periphery of the substrate arranged in a space from the ultrasonic wave transmitting tube in a direction of tangent line of the edge face while rotating the substrate by a rotatable rotation retaining portion.

Ultrasonic cleaning apparatus

An ultrasonic cleaning apparatus includes: an ultrasonic vibrator (); a liquid storage part () provided in contact with the ultrasonic vibrator; an inflow port () that makes a cleaning liquid () flow in the liquid storage part; and an outflow port () that makes the cleaning liquid flow out of the liquid storage part. A contact surface (), of the ultrasonic vibrator, which comes into contact with the cleaning liquid, is disposed lower than each of the inflow port and the outflow port.

Ultrasonic cleaning apparatus and ultrasonic cleaning method

An ultrasonic cleaning method of using ultrasonic vibrations to clean an object that is immersed in a cleaning liquid in a cleaning tank is provided. The method includes generating a frequency modulated signal including at least two frequency modulated portions having modulation widths different from each other with a single frequency as a center frequency, such that among the at least two frequency modulated portions a frequency modulated portion having a smaller modulation width is generated at a timing when a frequency modulated portion having a larger modulation width reaches the center frequency. The method further includes generating the ultrasonic vibrations based on the frequency modulated signal and transferring the ultrasonic vibrations to the cleaning tank to clean the object.

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Tokyo, Japan

Yasuhiro Imazeki