Matsushita Electric Industrial Co., Ltd.

Yasuhiro Hioki

Hideyuki Okinaka

Shunsuke Matsuda

Gen Itakura

Masaaki Ueda

Electronic part and method for producing the same

This invention relates to a method of writing, erasing, and reading of a large volume, high-density information. The writing is accomplished by ionizing an element different from a substrate element, and scanning the substrate by a focused ion beam of the ionized element for depositing the atoms of the ionized element on or implanting them into the surface layer of the substrate in accordance with an information signal. The erasing is done by sputtering to scatter the written element existing on the substrate with a focused ion beam of another element. The reading is accomplished by scanning the substrate with a focused electron beam, and detecting a difference in the intensity of energy spectrum of the scattering electrons, secondary electrons and Auger electrons emitted by the element of the substrate and the written element.

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Hirakata, Japan

Yasuhiro Hioki