Rigaku Corporation

Yasuhiko Nagoshi

Yoshiyuki Kataoka

Toshiaki Kozuki

Eiichi Furusawa

Yuki Fujimoto

An X-ray fluorescence spectrometer includes: a vacuum chamber () configured to be evacuated including at least a detection chamber in which a detector is disposed; drive units (A toH) each including a drive source outside the vacuum chamber (), and configured to perform a mechanical operation in the vacuum chamber (); and a vacuum leakage location identification unit (A,B) configured to: operate the drive units (A toH) one at a time while monitoring a degree of vacuum in the vacuum chamber (); if the change in the degree of vacuum in the vacuum chamber () before and after each operation is greater than or equal to a predetermined threshold, identify the relevant one of the drive units (A toH) as a vacuum leakage location; and cause information to that effect to be displayed in a display unit () and/or be recorded in a recording unit ().

X-ray fluorescence spectrometer

By regarding total precision of an X-ray intensity as counting precision due to statistical fluctuation and counting loss and by regarding the counting precision as a product of precision of an uncorrected intensity, which is an intensity before counting loss correction is performed, and a gradient of a corrected intensity with respect to the uncorrected intensity, a counting time calculation unit () included in an X-ray fluorescence spectrometer of the present invention calculates a counting time from specified total precision of the X-ray intensity, a given counting loss correction coefficient, and a given corrected intensity for each measurement line ().

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

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Kobe, Japan

Yasuhiko Nagoshi