Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sumitomo Eaton Nova Corporation (1 from 21 patents)
1 patent:
1. 7138641 - Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system