Hitachi, Ltd.

Hitachi Koki Co., Ltd.

Yasuhide Matsumura

Shigeo Kato

Susumu Saito

Kazuo Sato

Naoyuki Tamura

Masao Kamahori

Kanji Kato

Yoshio Watanabe

Sumio Okuno

Junkichi Miura

Gyozo Toda

Masuo Kasai

Hiroyuki Miyagi

Masafumi Kanetomo

Mamoru Taki

Muneo Mizumoto

Sumio Yamaguchi

Tadao Inoyama

Raiji Shimomura

Kiyoo Takeyasu

Yukio Nagano

An autosampler consists of a needle to draw specimen from a specimen container into a passage therein; a block having a passage that follows the passge in the needle; a suction mechanism for drawing in the specimen by suction through the passages in the needle and the block; a discharge mechanism for discarding the specimen drawn in by the suction mechanism; and a detecting device for detecting air bubble in the specimen, the detecting device being embedded in the block in such a manner as to face the passage in the block. The detecting device detects the air bubbles in the specimen according to changes in physical or chemical properties of the specimen passing through the passage in the block. The discharge mechanism is activated by the detecting device to discharge air-mixed specimen. When even a small amount of air is drawn into the passage from the specimen container, in which only a small amount of specimen is contained, the air specimen can reliably be distinguished from normal specimen by this autosampler. Therefore the reliability of the system using the autosampler can be significantly improved.

Autosampler with a means for detecting air bubble in specimen

The rotating mirror light deflecting system employs a non-circular dynamic gas bearing providing dynamic pressure to radially support the shaft. The bearing is provided internally with a multiplicity of grooves or embankments whereby dynamic gas pressure is increased to enhance rigidity. The bearing radially moves as a whole with damping according to a movement of the shaft, thus permitting nondestructive movement of the shaft and absorption of the resonant energy of the shaft. The shaft and the bearing will not come in contact with each other, and oscillation energy of the shaft is absorbed or dissipated by an external viscous or hysteresis resistance of the bearing therefore resonance oscillation is attenuated on the instant it occurs. Since the resonance point is high due to bearing surface rigidity, whirling is hard to arise, however, if whirling does arise, then the bearing and the shaft move together to attenuate oscillation energy of the shaft, therefore oscillation and whirling is put down immediately.

Light deflecting system with rotating mirror

An apparatus for molecular beam epitaxy according to the present invention is so constructed that a substrate is introduced into a vacuum vessel with a substrate surface for epitaxial growth facing in the direction of gravity, and that the substrate is conveyed to and transferred into vacuum chambers for performing processes necessary for the epitaxial growth, with the substrate surface maintained in the direction of gravity and without directly touching the substrate surface.

Apparatus for molecular beam epitaxy

A holding apparatus coupled to a drive shaft provides a holding mechanism. An elastic mechanism coupling the holding mechanism to the drive shaft and detectors for detecting a deflection of the holding mechanism with respect to the drive shaft. The holding mechanism holds a first member which is assembled to a second member and is controlled in response to a representative signal generated by the detectors. The elastic mechanism comprises two independent springs, one of which supports elastically the holding mechanism in the axial direction of the shaft and the other of which supports elastically the holding mechanism in the direction perpendicular to the axial direction thereof, whereby the holding mechanism is movably coupled with the drive shaft.

Holding apparatus with elastic mechanism

A joint mechanism of a manipulator, according to the present invention, consists of a first joint having its rotating shaft aligned with the Z-axis in the X-Y-Z Cartesian coordinate system established at a desired position in a working space, a second joint connected to the rotating shaft of the first joint and having its rotating shaft positioned within the X-Y coordinate plane, a third joint, connected to the rotating shaft of the second joint and having its rotating shaft aligned with the vector passing through the origin of the Cartesian coordinate system, and an arm assembly connected to the rotating shaft of the third joint and comprising a link mechanism which is driven so that a wrist connected to said arm assembly may be always moved on the prolongation line of the vector, to thereby provide a simplified joint mechanism of a manipulator having a redundant degree of freedom of the posture completely independent to the position of the wrist.

Joint mechanism of manipulator

Growing community of inventors

Hachioji, Japan

Yasuhide Matsumura