Jgc Japan Corporation

Yasubumi Kato

Takeshi Kojima

Masahiro Kawano

Megumi Tazawa

Yimeng Xu

A leakage inspection method and leakage inspection device for container to be inspected are provided. When a container to be inspected having a deformable flexible part is to be inspected for leakage, the container to be inspected is filled with an inspection gas containing helium, the container to be inspected, which has been filled with the inspection gas, is disposed in an inspection chamber partitioned from the outside, and an upward flow of a carrier gas is formed from the lower part to the upper part of the container to be inspected. A leakage of the inspection gas filled in the container to be inspected is then detected on the basis of the result of measuring the concentration of helium in the carrier gas collected at a position higher than a position where the carrier gas is fed into the inspection chamber.

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Kanagawa, Japan

Yasubumi Kato