Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Yasuaki Komae

Kosuke Takagi

Shinya Morita

Naonori Akae

Masato Terasaki

Keishin Yamazaki

Masahiro Miyake

Takashi Nogami

Tomoshi Taniyama

Kiyohiko Maeda

Yuji Urano

Naoki Matsumoto

Shigeru Odake

Takafumi Sasaki

Takatomo Yamaguchi

Daigi Kamimura

Kenji Shirako

Osamu Morita

A technique for improving stability and safety at the time of boat transfer is provided. A reaction tube configured to process a substrate, a seal cap, provided on an upper surface thereof with a substrate retainer for retaining the substrate, configured to close a furnace opening of the reaction tube, one of a first elevator and a second elevator configured to elevate the seal cap; and another of a first elevator and a second elevator configured to assist the one of the first elevator and the second elevator in elevating the seal cap.

Substrate processing apparatus

A substrate processing apparatus includes a process chamber and a transfer device configured to transfer a plurality of substrates to a substrate retainer. The transfer device includes a base; a first moving unit capable of linear motion; a first drive unit to drive the first moving unit. The first drive unit includes a first pulley group; a first motor coupled to a first pulley; and a first connecting member coupling the first belt and the first moving unit. A second moving unit is capable of linear motion. A second drive unit is in an enclosure of the first moving unit and drives the second moving unit. The second drive unit includes a second pulley group; a second belt wound on the second pulley group, a second motor coupled to drive a second pulley; and a second connecting member coupling the second belt and the second moving unit.

Substrate-processing apparatus and method of manufacturing semiconductor device

An apparatus and method capable of reducing the footprint of substrate processing system. An apparatus includes a housing chamber including a housing cabinet which houses housing containers for housing substrates, and a housing container carrying mechanism provided on the ceiling of the housing chamber and configured to carry the housing containers.

Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium

Boat for substrate processing apparatus

Reaction tube

Growing community of inventors

Toyama, Japan

Yasuaki Komae