Nhk Spring Co., Ltd.

Yasuaki Ishioka

Daisuke Hashimoto

Toshihiko Hanamachi

Satoshi Hirano

Jun Futakuchiya

Naoki Ito

Yohei Itami

A method of manufacturing a laminate in which a spray coating film made of a material different from a base material is laminated on the base material includes: a base material heating step of heating the base material; an intermediate layer forming step of forming, on a surface of the heated base material, an intermediate layer made of a material different from the base material and the spray coating film; and a spray coating film forming step of forming the spray coating film on a surface of the intermediate layer.

Method of manufacturing laminate and laminate

A substrate support device includes a plate portion including a heater plate that includes a heating element provided in the heater plate, and also including a first cooling plate provided on a bottom surface of the heater plate and having a first flow path, and a second cooling plate provided on a top surface of the heater plate and having a second flow path; and a shaft portion supporting the plate portion and including a line connected to the heating element to supply an electric current to the heating element, and a tube supplying a coolant to the first cooling plate and the second cooling plate, the line and the tube being provided inside the shaft portion.

Substrate support device

Growing community of inventors

Kanagawa, Japan

Yasuaki Ishioka