Kla Tencor Corporation

Technion Research & Development Foundation Limited

Eyeway Vision Ltd.

Voxelsensors Srl

Yaron Zimmerman

Boris Greenberg

Fares Marjieh

Vladimir Levinski

Joel L Seligson

Semion Kofman

Mordekhai Velger

Izhak Bucher

Abraham Rotnemer

Arkady Bronfman

Igor Tikhonenkov

Royi Levav

Shoam Shwartz

Hanna Friedman

Alex Novikov

Shlomi Efrati

Methods and systems for tracking an individual's eye, by tracking one or more ocular axes, are presented. The technique comprises the following: (i) illuminating the eye, over an area of the cornea extending over the pupil, with first and second incident light beams having a transverse cross sectional area smaller than a predetermined value with respect to an area of the pupil and propagating coaxially along a first optical path defined by central axes of the first and second incident light beams, wherein said first incident light beam is configured to be reflected from the cornea and said second incident light beam is configured to pass through the cornea and the pupil and to be reflected from a retina region of the eye; (ii) detecting respective first and second reflected light beams; (iii) adjusting the first optical path such that said first reflected light beam propagates along said first optical path and said second reflected light beam propagates along a second optical path having a predetermined spatial relationship with said first optical path whereby said predetermined spatial relationship is indicative of said ocular axis being along at least said first optical path; and (iv) tracking said ocular axis of the eye under changes in gaze direction of said eye by repeating (i) to (iii).

Eye tracking systems and methods

Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said stator and rotor. The electric circuit comprising one or more amplifiers configured to provide electric control signal to the one or more MEMS actuators to selectively vary position of said payload. The electric circuit comprises a sensing circuit configured for providing an alternating carrier signal and for monitoring said carrier signal to generate data on impedance of said one or more MEMS actuators indicative of position of the rotor with respect to the stator of said one or more MEMS actuators.

MEMS based light deflecting device and method

Geometric-waveform oscillator for processing light, the geometric waveform oscillator including a plurality of masses, at least one force producing element, and a plurality of elastic elements, each of the force producing elements being coupled with a respective one of the masses, at least one of the masses including a light processing module, each of the force producing elements applying a force to the masses, the elastic elements coupling the masses together, the elastic elements coupling the masses with a respective support, wherein the mass values of the masses, the force values of the forces, and the stiffness coefficients of the elastic elements, are selected such that the light processing module oscillates according to the geometric-waveform.

Oscillating mirror having a plurality of eigenmodes

A method and system for performing measurements on a test sample with a metrology or inspection tool are disclosed. At least one of the test sample and the tool is moved with respect to the other from a first position to a second position. At the second position, the tool is aligned for measurement of a measurement target on the sample. A focus of the tool on the test sample is adjusted while moving from that first position to the second position.

Method and apparatus for increasing metrology or inspection tool throughput

Growing community of inventors

Kiryat Tivon, Israel

Yaron Zimmerman