Applied Materials, Inc.

Yaron I Gold

Pavel Adamec

Igor Petrov

Asher Pearl

Radel Ben-Av

Alex Goldenshtein

Nadav Haas

The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

Method and system for the examination of specimen

A method for generating an enhanced image includes the steps of: (a) receiving a matrix of pixels representative of an image; (b) generating a gradient image representative of a difference between values of adjacent pixels; (c) calculating a center of mass for each pixel of the gradient image in response to gradient intensity values and location values of neighboring pixels; and (d) generating an enhanced image by modifying intensity values of pixels of the matrix of pixels that are located in a vicinity of local centers of mass in response to intensity values of pixels that are further displaced from the local centers of mass.

System and method for edge enhancement of images

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Ramat-Hasharon, Israel

Yaron I Gold