Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Fraunhofer Usa, Inc.

Yaran Mahmut

Michael Frank Becker

Thomas Schuelke

Hans-Joachim Scheibe

Lars Haubold

Michael Becker

A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.

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East Lansing, MI, United States of America

Yaran Mahmut