Jiangsu Leuven Instruments Co. Ltd

Yaoyao Zhang

Dongdong Hu

Na Li

Kaidong Xu

Haiyang Liu

Shiran Cheng

Lu Chen

Xiaobo Liu

Song Guo

Xiaoli Shi

Xiaolei Li

An anti-breakdown ion source discharge apparatus includes a discharge chamber, a coil support, an upper insulation fixing block, a discharge component and an ion source chamber. The discharge component includes a radio-frequency coil, a lower conductive connector and an upper conductive connector. The radio-frequency coil is fixed on a coil support base; the coil support base is clamped on an inner wall of the bottom of the ion source base; the coil support is along the circumference of the coil support base; the radio-frequency coil passes through the coil support; the upper conductive connector passes by the radio-frequency coil and the coil support base from the outside of the radio-frequency coil and extends into the bottom of the discharge chamber; and the upper insulation fixing block is sleeved over the upper conductive connector and is fixed on the inner wall of the bottom of the ion source chamber.

Anti-breakdown ion source discharge apparatus

Growing community of inventors

Xuzhou, China

Yaoyao Zhang