Advanced Micro-Fabrication Equipment, Inc. Asia

Other

Applied Materials, Inc.

Yaomin Xia

Jun Wu

Joseph W Stucki

A RF matching network is described, and which includes a 1to nth RF generators, and wherein each RF generator has a different frequency, and wherein the frequencies of the 1to the nth RF input ports decline in sequence, and wherein between the ith frequency RF input port, and the output port is a ith circuit, which has a high impedance at the output port to all RF generator frequencies other than the ith frequency; and wherein the ith circuit, when connected to a RF generator with the ith frequency, and wherein measuring from the output port to the ith circuit, the ith circuit has a first impedance at the ith frequency; and when measuring from the output port in the opposite direction to the ith circuit, the ith circuit has a second impedance at the ith frequency; and wherein the first impedance is a substantial conjugate match of the second impedance.

RF matching network of a vacuum processing chamber and corresponding configuration methods

A vacuum processing chamber and method of using a vacuum processing chamber are described and which includes a chamber defined by a chamber body, and wherein the chamber body defines an internal cavity; first and second electrodes are mounted in the internal cavity as defined by the chamber body; an RF generator is provided, and which produces single or multiple frequencies and which is electrically coupled to at least one of the first or second electrodes, and which are operable, when energized, to produce a plasma within the internal cavity of the chamber body; and an adjustable component borne by the chamber body, and which is fabricated, at least in part, from a dielectric material, and which selectively adjusts the equivalent dielectric constant which exists between the chamber body and the first electrode.

Vacuum processing chamber and method of processing a semiconductor work piece

The invention relates to temperature indicating compositions which display temperature dependent color changes. The invention encompasses temperature indicating compositions, materials, devices and methods of their use. The temperature indicating compositions of the invention are clays that can be used to detect temperature and temperature changes at sub-ambient and particularly sub-zero &deg; C. temperatures. Temperature of a selected environment can be monitored by placing a temperature-sensitive composition comprising the clay material of this invention in contact with that environment and monitoring the color of the composition.

Growing community of inventors

San Jose, CA, United States of America

Yaomin Xia