Industrial Technology Research Institute

Chroma Ate Inc.

Yaomin Lin

Hau-Wei Wang

Ying-Cheun Spring Yeh

Chieh-Yi Lo

Hung-Chang Chang

A surface profile measuring method using a broad bandwidth light source illuminating a sample surface and a reference surface through a splitter is provided. By changing a distance between the sample surface and the reference surface with a constant step, an interference diagram with a waveform composed of interference data points depicting a relationship of surface height versus illumination intensity is generated. In the beginning, a first data point with greatest illumination intensity is selected from the interference data points on the waveform. Then, a second data point is selected from the data points on the waveform within a predetermined range centered at the first data point to have the waveform showing best quality of symmetry. Then, a peak of a fringe defined by the second data point and its neighboring data points is estimated by using phase compensating approach.

Surface profile measuring method

An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.

Interferometric apparatus and method for surface profile detection

A spectrum measuring apparatus for measuring infrared, Raman and fluorescence spectra. The spectrum measuring apparatus includes an infrared source, a laser source, an infrared up-conversion object lens, an object lens, a dual color lens, an ocular, a narrow band filter, a visible light image capturing device and a sample pedestal. The infrared spectrum is measured by the infrared up-conversion object lens. The Raman and fluorescence spectra are measured by the object lens.

Spectrum measuring apparatus

A microscopic image apparatus for converting infrared light into visible light. The microscopic image apparatus includes a sample stage, an infrared source, an object lens for converting infrared light into visible light, a visible light source, a dichroic mirror, a visible light imaging lens and a visible light image capturing device. The object lens further includes an optical crystal and an infrared object lens. After the infrared source outputs infrared light to a sample placed on the sample stage, the object lens converts infrared light spectrum image into visible light spectrum image. Then, the visible light spectrum image is obtained by the visible light imaging lens and the visible light image capturing device.

Microscopic image apparatus for converting infrared light into visible light

The invention provides an optical trapping skirt for adjusting the diameter of a beam passing thereof by varying the aperture. The optical trapping skirt has a body of bell shape and an iris diaphragm of bell shape, wherein the iris diaphragm of bell shape is installed inside the body so as to construct a ring like cavity. The undesired portion of the beam, which is incident on the iris diaphragm, is trapped in the ring like cavity and cannot be escaped. The aperture of the iris diaphragm is adjustable, so the diameter of the beam passing the optical trapping skirt is also controllable.

Growing community of inventors

Hsinchu, Taiwan

Yaomin Lin