Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Semiconductor Manufacturing Technologies Ag (1 from 22 patents)
1 patent:
1. 6733369 - Method and apparatus for polishing or lapping an aspherical surface of a work piece