Seagate Technology Incorporated

Yao-Tzung Roger Shih

Taesun Ernest Kim

Hyung Jai Lee

Dennis R Hollars

Chung Yuang Shih

Wen Hong Liu

Weilu Hang Xu

Robert B Zubeck

John C Bruno

Sam Vi Luong

Ultra-thin, corrosion resistant, hydrogenated carbon overcoats by combined sputtering and PECVD

A non-arcing bias rail assembly for supplying an electrical bias potential to a moving workpiece/substrate holder, comprising an elongated metal strip adapted for mounting along a wall of a workpiece/substrate treatment apparatus and having a surface bounded by first and second opposed, laterally extending side edges; a bracket comprised of an electrically insulating material and including a first portion mounted on the surface adjacent to and extending along a portion of the first side edge, and a second portion forming an upstanding wall extending perpendicularly from the first portion and including a surface facing the second side edge of the metal strip; an electrically conductive bias contact spring assembly mounted on the upstanding wall of the bracket facing the second side edge; and electrically insulated wire means electrically connected to the bias contact spring assembly for supplying an electrical bias potential.

Method and apparatus for workpiece biassing utilizing non-arcing bias rail

A hydrogenated carbon film for magnetic thin film recording media is manufactured by alternating current magnetron sputtering in an atmosphere containing argon and a hydrocarbon gas. Targets mounted side-by-side cyclically sputter and discharge charge buildup according to an alternating current. Shielding between the targets directs electrons toward the anode at a given time.

Apparatus and method for sputtering carbon

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Cupertino, CA, United States of America

Yao-Tzung Roger Shih