Taiwan Semiconductor Manufacturing Comp. Ltd.

Yao-Pin Yang

Sung-Chun Yang

Ying-Chi Peng

Huan-Lisng Tzeng

Chen-Chun Yan

In an embodiment, a system includes: a base with a bore hole, wherein the base is configured to secure a wafer at a first position on the base; a pin extending through the bore hole; a focus ring horizontally surrounding the wafer at the first position and extending upwardly from the base, wherein the wafer is configured to be moved vertically between the first position and a second position above the focus ring via the pin; and a slit valve above the focus ring, wherein the wafer is configured to be moved horizontally between the second position and the slit valve via a robotic arm.

Systems and methods for fixed focus ring processing

Embodiments of mechanisms of a wafer pod including a wafer positioning mechanism are provided. The wafer positioning mechanism includes a base including a blocking portion, and a linking bar pivoted on the base and including a resilient portion. The wafer positioning mechanism also includes a pushing element pivoted on the linking shaft. Further, when the pushing element is at a retaining position, the resilient portion abuts against the blocking portion, and a force generated by the linking bar is applied to the pushing element.

Wafer pod and wafer positioning mechanism thereof

Embodiments of mechanisms of a wafer pod including a pod door are provided. The pod lock includes a rotating element pivoted on the pod housing and having an anchor element disposed on the rotating body. The pod lock further includes a locking element including a locking body slidably disposed on the pod housing. The pod lock also includes an elastic element disposed on the locking body, and adjacent to the anchor element. When the rotating element is rotated, the rotating element pushes the locking element to move, and the elastic element applies an elastic force on the anchor element.

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Zhubei, Taiwan

Yao-Pin Yang