Industrial Technology Research Institute

Taiwan Semiconductor Manufacturing Comp. Ltd.

Yao-Hui Huang

Gaw-Hao Huang

Chih-Hao Lin

Shih-Ming Lin

Huey-Song You

Shan-Shan Chou

Shwu-Huey Perng

Tung-Li Lee

Yen-Fei Lin

James Sun

Chen Pu-Fang

David Huang

Shen-Nan Lee

The present invention relates to a method for increasing the grain size of a polysilicon layer, which includes exposing a silicon oxide wafer in a deposition chamber to an amount, effective for the purpose, of nitrogen at a flow rate of at least about 240 standard liters per minute (slm). The instant invention further relates to a method for inhibiting the formation of a polysilicon seed in a furnace, which includes the treatment as noted above. The invention also relates to a method for forming a polysilicon layer, including: forming a silicon oxide layer on a substrate, the silicon oxide layer having a plurality of oxygen molecules therein; exposing the silicon oxide layer to a predetermined amount of nitrogen-containing gas in a furnace, whereby a plurality of nitrogen molecules in the nitrogen-containing gas replaces at least part of the oxygen molecules in the silicon oxide layer; and forming a polysilicon layer on the silicon oxide layer.

Method for increasing polysilicon grain size

A process to purify wastewater by chemical oxidation is disclosed. The purification is carried out in a fluidized bed of a suitable particulate carrier upon which the iron(III) compound produced by Fenton's reaction crystallizes or coats, thereby reducing the sludge content of effluent over 50%. In addition, the fluidized bed improves the COD removal by way of thoroughly mixing the wastewater with adding agents.

Process for chemically oxidizing wastewater with reduced sludge

Disclosed is a method for treating highly concentrated wastewater by electrolysis and oxidization, said method being characterized in that the electrolysis and oxidization are carried out in a fluidized bed of a suitable particulate carrier. The electrolytic reduction efficiency of ferric ions is improved by the fluidized particulate carrier, and thus a high proportion of iron(III) to iron(II) can be sustained in the system. This invention allows extensive purification of wastewater with improved efficiency.

Method of wastewater treatment by electrolysis and oxidization

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Hsinchu, Taiwan

Yao-Hui Huang