Macronix International Co., Ltd.

Yao-Fu Chan

Ta-Kang Chu

Chen-Chin Liu

Chun-Pei Wu

Cheng-Ming Yih

Ting-Feng Liao

Jung-Chuan Ting

A method of fabricating a semiconductor device is provided. A stack layer is formed on a substrate. The stack layer is patterned to form a plurality of stack structures extending in a first direction. A trench extending in the first direction is located between two adjacent stack structures. Each trench has a plurality of wide portions and a plurality of narrow portions. A maximum width of the wide portions in a second direction is larger than a maximum width of the narrow portions in the second direction. A charge storage layer is formed to cover a bottom surface and sidewalls of the wide portion and fill up the narrow portion. A conductive layer is formed to fill up the wide portion. A semiconductor device formed by the method is also provided.

Semiconductor device and method of fabricating the same

A semiconductor device and a method of forming the same are provided. At least two separated stacked structures and at least two hard mask patterns respectively on the stacked structures are formed on a substrate. A patterned mask layer is formed on the substrate. The patterned mask layer has an opening which exposes a portion of top surfaces of the hard mask patterns and a portion of the substrate between the stacked structures. The exposed portion of the substrate is removed by using the patterned mask layer and the hard mask patterns as a mask, so as to form a trench in the substrate. An ion implantation process is performed by using the patterned mask layer and the hard mask patterns as a mask, so as to form a doped region in the substrate around the trench.

Semiconductor device and method of forming the same

A pad structure including a plurality of staircase structures is provided. The staircase structures are disposed on the substrate. Each of the staircase structures includes a plurality of conductor layers and a plurality of dielectric layers that are alternately stacked. Two adjacent staircase structures are connected with each other by sharing the conductor layers and the dielectric layers and are arranged in parallel along a first direction. One of the two adjacent staircase structures includes at least one staircase portion that gradually decreases in height along a second direction, and the other of the two adjacent staircase structures includes at least one staircase portion that gradually decreases in height along a direction opposite to the second direction.

Pad structure

A method for fabricating a floating gate memory device comprises using thin buried diffusion regions with increased encroachment by a buried diffusion oxide layer into the buried diffusion layer and underneath the tunnel oxide under the floating gate. Further, the floating gate polysilicon layer has a larger height than the buried diffusion height. The increased step height of the gate polysilicon layer to the buried diffusion layer, and the increased encroachment of the buried diffusion oxide, can produce a higher GCR, while still allowing decreased cell size using a virtual ground array design.

Apparatus and associated method for making a floating gate cell in a virtual ground array

A memory and a method of fabricating the same are provided. The memory is disposed on a substrate in which a plurality of trenches is arranged in parallel. The memory includes a gate structure and a doped region. The gate structure is disposed between the trenches. The doped region is disposed at one side of the gate structure, in the substrate between the trenches and in the sidewalls and bottoms of the trenches. The top surface of the doped region in the substrate between the trenches is lower than the surface of the substrate under the gate structure by a distance, and the distance is greater than 300 &#x212b;.

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Hsinchu, Taiwan

Yao-Fu Chan