Globalfoundries Inc.

Qualcomm Incorporated

International Business Machines Corporation

Globalfoundries Singapore Pte. Ltd.

Yanxiang Liu

Min-Hwa Chi

Xiaodong Yang

Haining S Yang

Jerome Ciavatti

Kern Rim

Jinping Liu

Shesh Mani Pandey

Michael John Hargrove

Christian Gruensfelder

Jun Yuan

Jianwei Peng

Min Dai

Francis Lionel Benistant

Johannes M Van Meer

Peijie Feng

Srikanth Balaji Samavedam

Vara Govindeswara Reddy Vakada

Stanley Seungchul Song

Xusheng Kevin Wu

Junjing Bao

Manfred Eller

Jin Ping Liu

Da Yang

Vara Vakada

Bin Yang

Michael Patrick Chudzik

Jeffrey Xu

Xiang Hu

Young Way Teh

Anurag Mittal

Laegu Kang

Gan Wang

Edmund Kenneth Banghart

Jihong Choi

Youseok Suh

Xiaoli He

Hans Van Meer

Myung Hee Nam

A semiconductor device may include a source/drain contact trench adjacent to a gate. The source/drain contact trench may include a first portion and a second portion on the first portion. The semiconductor device also may include an insulating contact spacer liner within the source/drain contact trench. The insulating contact spacer liner contacts the first portion but not the second portion of the source/drain contact trench. The semiconductor device may further include a conductive material within the insulating contact spacer liner and the second portion of the source/drain contact trench. The conductive material may land in a source/drain region of the semiconductor device.

Contact for semiconductor device

Multigate devices and fabrication methods that mitigate the layout effects are described. In conventional processes to fabricate multigate semiconductor devices such as FinFET devices, long isolation cut masks may be used. This can lead to undesirable layout effects. To mitigate or eliminate the layout effect, fabrication methods are proposed in which the interlayer dielectric (ILD) layer remains intact at the gate cut location during the fabrication process.

Layout effect mitigation in FinFET

There is set forth herein a semiconductor device fabricated on a bulk wafer having a local buried oxide region underneath a channel region of a MOSFET. In one embodiment the local buried oxide region can be self-aligned to a gate, and a source/drain region can be formed in a bulk substrate. A local buried oxide region can be formed in a semiconductor device by implantation of oxygen into a bulk region of the semiconductor device followed by annealing.

Semiconductor device having local buried oxide

To avoid the problems associated with low density spin on dielectrics, some examples of the disclosure include a finFET with an oxide material having different densities. For example, one such finFET may include an oxide material located in a gap between adjacent fins, the oxide material directly contacts the adjacent fins of the plurality of fins with a first density proximate to a top layer of the oxide material and a second density proximate to a bottom layer of the oxide material and wherein the first density is greater than the second density.

Systems, methods, and apparatus for improved finFETs

Fin Field Effect Transistor (FET) (FinFET) complementary metal oxide semiconductor (CMOS) circuits with single and double diffusion breaks for increased performance are disclosed. In one aspect, a FinFET CMOS circuit employing single and double diffusion breaks includes a P-type FinFET that includes a first Fin formed from a semiconductor substrate and corresponding to a P-type diffusion region. The FinFET CMOS circuit includes an N-type FinFET that includes a second Fin formed from the semiconductor substrate and corresponding to an N-type diffusion region. To electrically isolate the P-type FinFET, first and second single diffusion break (SDB) isolation structures are formed in the first Fin on either side of a gate of the P-type FinFET. To electrically isolate the N-type FinFET, first and second double diffusion break (DDB) isolation structures are formed in the second Fin on either side of a gate of the N-type FinFET.

Fin field effect transistor (FET) (FinFET) complementary metal oxide semiconductor (CMOS) circuits employing single and double diffusion breaks for increased performance

A sacrificial cap is grown on an upper surface of a conductor. A dielectric spacer is against a side of the conductor. An upper dielectric side spacer is formed on a sidewall of the sacrificial cap. The sacrificial cap is selectively etched, leaving a cap recess, and the upper dielectric side spacer facing the cap recess. Silicon nitride is filled in the cap recess, to form a center cap and a protective cap having center cap and the upper dielectric spacer.

Method and apparatus for selectively forming nitride caps on metal gate

A device includes a source contact, a drain contact, a gate contact, and a body contact. The body contact is electrically coupled to a temperature sensing circuit. The source contact, the drain contact, the gate contact, and the body contact are included in a fin field-effect transistor (finFET).

Transistor temperature sensing

Tunneling field effect transistors and fabrication methods thereof are provided, which include: an integrated circuit device which includes a circuit input configured to receive an input voltage and a circuit output configured to deliver an output current. The integrated circuit also includes a circuit element having at least one tunneling field effect transistor (TFET). The circuit element connects the circuit input to the circuit output and is characterized by a V-shaped current-voltage diagram. The V-shaped current-voltage diagram describes the relationship between the input voltage of the circuit input and the output current of the circuit output.

Modified tunneling field effect transistors and fabrication methods

Method for mitigating layout effect in FINFET

The n-type to p-type fin-FET strength ratio in an integrated logic circuit may be tuned by the use of cut regions in the active and dummy gate electrodes. In some examples, separate cut regions for the dummy gate electrodes and the active gate electrode may be used to allow for different lengths of gate pass-active regions resulting in appropriately tuned integrated logic circuits.

System, apparatus, and method for N/P tuning in a fin-FET

A method of fabrication of a device includes performing a gate cut to cut a gate line to create a first gate region and a second gate region. The method further includes depositing a conductive material to form a conductive jumper structure to connect the first gate region and the second gate region.

Device and method to connect gate regions separated using a gate cut

Tunneling field effect transistors and fabrication methods thereof are provided, which include: obtaining a gate structure disposed over a substrate structure; and providing a source region and a drain region within the substrate structure separated by a channel region, the channel region underlying, at least partially, the gate structure, and the providing including: modifying the source region to attain a narrowed source region bandgap; and modifying the drain region to attain a narrowed drain region bandgap, the narrowed source region bandgap and the narrowed drain region bandgap facilitating quantum tunneling of charge carriers from the source region or the drain region to the channel region. Devices including digital modulation circuits with one or more tunneling field effect transistor(s) are also provided.

A non-planar semiconductor structure includes a semiconductor substrate, multiple raised semiconductor structures coupled to the substrate, a drain well in each of the raised structures, and a drain in each drain well. The structure further includes an isolation region in each drain well adjacent the drain, each isolation region reaching to a top surface of the corresponding raised structure, and a conductive center gate on each raised structure, the conductive center gate covering a top surface, a front surface and a back surface thereof, and covering a portion of the isolation region opposite the drain. The isolation regions in the drain wells reaching to the raised structure top surface is a result of preserving the isolation region by covering it during fabrication with an HDP oxide to prevent partial removal.

Non-planar semiconductor structure with preserved isolation region

A finFET device according to some examples herein may include an active gate element above an active fin element and a dummy fin element that partially breaks the active gate element. In another example, a dummy gate element adjacent to an active gate element contains a dummy fin element that partially breaks the dummy gate element. In another example, a first dummy fin element partially breaks an active gate element and a second dummy fin element partially breaks a dummy gate element. In another example, the dummy fin element is of the same material as the active fin element. In another example, the dummy fin element partially breaks a gate element but does not extend to the substrate like the active fin element.

FinFET device and method of making the same

In a particular aspect, an integrated circuit includes a first gate structure coupled to a first fin field effect transistor (FinFET) device. The integrated circuit includes a second gate structure coupled to a second FinFET device. The first gate structure and the second gate structure are separated by a dielectric region. The integrated circuit further includes a metal contact having a first surface that is in contact with the dielectric region, the first gate structure, and the second gate structure.

Structure and method for tunable memory cells including fin field effect transistors

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Glenville, NY, United States of America

Yanxiang Liu