University of Electronic Science and Technology of China

Yanrong Li

Jie Xiong

Fei Zhang

Xiaohui Zhao

Chaoren Li

Bowan Tao

Yang Wang

Miao Zhang

Liping Dai

Chaoyi Yan

Wanli Zhang

Junwei Chu

Jianwen Huang

Xianfu Wang

Chujun Yin

Chuanhui Gong

Xinrui Chen

Yuqing Liu

Gaofeng Rao

Chunyang Wu

The invention provides a thin film deposition system and a method, and relates to the field of thin film deposition. The deposition method comprises the following steps: 1) heating metal substrate; carrying out deposition. The method is characterized in the step 1) that a current is conducted into the metal substrate at one end of the growth zone by one electrode, and out of the metal substrate at the other end of the growth zone by the other electrode, so that the metal substrate is heated by the heat emitting of the resistant of the metal substrate itself. According to the method, the quality of the prepared thin film is improved, while the preparation cost of the thin film is reduced. In addition, the consistent double-sided thin films can be easily prepared on two surfaces of the metal substrate by employing the system and method.

Thin film deposition preparation device and method

A method for preparing an ultrathin two-dimensional (2D) monocrystalline nanosheet, the method including: 1) placing BiXpowder where X=I, Br, or Cl in a crucible, and putting the crucible on a first heating zone of a furnace disposed at a gas inlet of a quartz tube; placing substrates covered with metal sheets on a second heating zone of the furnace disposed at a gas outlet of the quartz tube; 2) vacuumizing the quartz tube; pumping Ar gas into the quartz tube until the air pressure is 101.325 kPa; pumping a carrier gas into the quartz tube; and 3) heating and maintaining the second heating zone; heating the first heating zone for BiXevaporation until producing chemical reaction between BiXand the metal sheets, and preparing ultrathin 2D nanosheets on the substrates simultaneously; and cooling the substrate naturally to 15-30&#xb0; C.

Method for preparing ultrathin two-dimensional nanosheets and applications thereof

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Chengdu, China

Yanrong Li