Schott Glass Technologies (suzhou) Co. Ltd.

Yanquan Shan

Pengxiang Qian

Thomas Wiegel

Guangjun Zhang

A diffractive optical element is provided that includes at least two layers with different etching speeds for dry etching process. The diffractive optical element has a substrate of glass and a microstructure layer arranged on the substrate. The ratio of dry etching speed in thickness direction of the substrate to that of the microstructure layer is no more than 1:2 so that the substrate functions as an etching stop layer. The ratio of dry etching speed in horizontal direction of the substrate is substantially equal to that of the microstructure layer. The composition of glass includes, but is not limited to, AlO3, alkaline material (MO) and alkaline earth material (MO), where the weight percentage of AlO+MO+MO>=5%.

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Suzhou, China

Yanquan Shan