International Business Machines Corporation

Yanqing Wu

Wenjuan Zhu

Jin Cai

Josephine B Chang

Shu-Jen Han

Fei Liu

Wilfried Haensch

Phaedon Avouris

Yu-Ming Lin

Zihong Liu

Semiconductor nano pressure sensor devices having graphene membrane suspended over cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.

Graphene pressure sensors

Semiconductor nano pressure sensor devices having graphene membrane suspended over open cavities formed in a semiconductor substrate. A suspended graphene membrane serves as an active electro-mechanical membrane for sensing pressure, which can be made very thin, from about one atomic layer to about 10 atomic layers in thickness, to improve the sensitivity and reliability of a semiconductor pressure sensor device.

A three-dimensional integrated circuit includes a semiconductor device, an insulator formed on the semiconductor device, an interconnect formed in the insulator, and a graphene device formed on the insulator.

Graphene devices and semiconductor field effect  transistors in 3D hybrid integrated circuits

A circuit includes a negative differential resistance (NDR) device which includes a gate and a graphene channel, and a gate voltage source which modulates a gate voltage on the gate such that an electric current through the graphene channel exhibits negative differential resistance.

Growing community of inventors

Ossining, NY, United States of America

Yanqing Wu