Tsinghua University

Beijing U-precision Tech Co., Ltd.

Yanpo Zhao

Li Ni Zhang

Ming Lei Zhang

Yu Zhu

Jin Zhang

Li Tian

Jinchun Hu

Kaiming Yang

Wensheng Yin

Rong Cheng

Zhao Liu

Haihua Mu

Weinan Ye

Huichao Qin

Fan Zhi

Dengfeng Xu

Leijie Wang

A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform () of the reticle stage, a balance mass (), a drive motor, a mask plate (), a base (), a vibration isolation system (), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

Coarse motion and fine motion integrated reticle stage driven by planar motor

A three-DOF (Degree of Freedom) heterodyne grating interferometer displacement measurement system comprises a dual-frequency laser, a grating interferometer, a measurement grating, receivers and an electronic signal processing component; the grating interferometer comprises a polarizing beam splitter, a reference grating and dioptric elements; the measurement system realizes displacement measurement on the basis of grating diffraction, the optical Doppler Effect and the optical beat frequency principle. Three linear displacements can be output by the system when the grating interferometer and the measurement grating perform a three-DOF linear relative motion. The measurement system can reach sub-nanometer and higher resolution and precision, and can simultaneously measure three linear displacements. The measurement system has the advantages of being environmentally insensitive, high in measurement precision, small in size, light in weight, and is capable of improving the overall performances of an ultra-precision stage of a lithography machine as a position measurement system for this stage.

Three-DOF heterodyne grating interferometer displacement measurement system

A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (), a balance mass (), a drive motor, a mask plate (), a base (), a vibration isolation system (), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.

Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor

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Beijing, China

Yanpo Zhao