Pfeiffer Vacuum Gmbh

Yannick Grenier

Serge Brandolin

Didier Pierrejean

Mickael Rusconi

Jean-Marc Paget

Julien Valentin

Paul Decorde

A dry-type primary vacuum pump includes an injection device to distribute a purging gas in the pumping stages. The injection device includes: a first pressure sensor arranged on a common portion of the distributor, a second pressure sensor arranged on each branch of the distributor, and a control unit to generate a pulse width modulation command signal for the control of the regulation valves independently of one another as a function of the pressure measurement differences between the first pressure sensor and the second pressure sensors.

Dry-type primary vacuum pump and method for controlling the injection of a purging gas

A pumping system is provided, including a rough-vacuum pump; a Roots vacuum pump including a pumping stage having a stator inside which two Roots rotors are configured to rotate synchronously in opposite directions to drive a gas to be pumped between an inlet orifice and an outlet orifice; and a pipeline connecting the outlet orifice to an intake of the rough-vacuum pump, a shortest distance between an edge of the outlet orifice and each of the Roots rotors in the pumping stage being less than 3 cm, and the outlet orifice being situated at the end of an upstream tube of the pipeline that passes into the pumping stage.

Pumping unit including a rough vacuum pump and a roots vacuum pump

A dry vacuum pump is provided, including two shafts, respectively supporting at least one pumping rotor being configured to synchronously rotate in reverse in order to convey a gas to be pumped from an intake of the dry vacuum pump to an outlet; and a synchronous motor configured to rotate one shaft of the two shafts, the synchronous motor including a rotor coupled to the shaft, a first stator with windings arranged around the rotor, and at least one second stator with windings arranged around the rotor, the windings of the stators being configured to be supplied individually or simultaneously in order to adapt a power of the synchronous motor to a pumping load. A method for controlling a synchronous motor of a vacuum pump is also provided.

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Doussard, France

Yannick Grenier