Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Yannick Deimerly

Guillaume Jourdan

Patrice Rey

Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.

Microelectromechanical and/or nanoelectromechanical structure with a variable quality factor

A device for detecting an acceleration in one direction and a speed of rotation along one direction, including a support and two structures mechanically coupled to each other in opposite phase and suspended relative to the support, each of the structures including: an excitation mass; an excitation mechanism configured to move the excitation mass in a given direction; an inertial mass suspended to the excitation mass; a detector connected to the inertial mass to be displaced by same, and the detector connected to the support; a mechanism for detecting displacement of the inertial mass; and a controller controlling the excitation mechanism and processing signals delivered by the detecting mechanism.

Compact device for detecting at least one acceleration and one speed of rotation

The present invention relates to an inertial micro-sensor of angular displacements comprising at least one inertial mass () movable in space (x, y, z); an exciter () configured to generate a first vibratory movement of the inertial mass along a first direction (X) included in the plane (x, y), so as to generate a first Coriolis force induced by an angular displacement of the inertial mass () around a second direction (Y) included in the plane (x, y) and perpendicular to the first direction (X); an exciter () configured to generate a second vibratory movement of the inertial mass along the second direction (Y), so as to generate a second Coriolis force induced by an angular displacement of the inertial mass () around the first direction (X), and means for detecting the first Coriolis force and the second Coriolis force, characterized by the fact that the detection means comprise a common detector for the first Coriolis force and the second Coriolis force and configured to produce an electrical signal processed by a processing circuit so as to distinguish a first component of the electrical signal corresponding to the first Coriolis force and a second component of the electrical signal corresponding to the second Coriolis force.

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Grenoble, France

Yannick Deimerly