Nanoscribe Gmbh

Yann Tanguy

Roman Reinhard Reiner

Michael Thiel

Joerg Hoffmann

Fabian Niesler

Jörg Hoffmann

A method for producing a three-dimensional overall structure () by a structuring device (), which has a predefined principal direction () of the structure entry in a writing region (). The overall structure () is defined by sequential definition of a plurality of partial structures () that complement one another overall to form the overall structure (). The partial structures () are delimited in each case within enveloping interfaces (). In this case, the partial structures () are chosen in such a way that the enveloping interfaces () extend obliquely with respect to the principal direction () of the structure entry.

Process for producing a three-dimensional structure

A method for producing a three-dimensional structure () in a lithographic material () that can be polymerized and thus solidified using energy input methods, wherein initially a shell wall () of the three-dimensional structure () to be produced is polymerized so as to form a polymerized shell wall () such that a volume () of unpolymerized lithographic material is enclosed using a first, spatially resolving energy input method, wherein the lithographic material () surrounding the polymerized shell wall () is removed in an intermediate development step, wherein subsequently the volume () enclosed by the shell wall () is polymerized using a second energy input method.

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Linkenheim-Hochstetten, Germany

Yann Tanguy