Beijing Sevenstar Electronics Co., Ltd.

Beijing Yojaja Software Technology Development Co., Ltd.

Yanhui Shi

Yi Ke Wu

Wen Han Luo

Junhao Zhou

Mengyang Jiang

Xingpeng Xiao

In some embodiments, a method analyzes a characteristic of a segment list for a user identifier, and compares the characteristic for the segment list to two or more thresholds. A storage type is determined for the segment list based on the comparing. A value for the segment list is stored using a storage type from a plurality of storage types based on the characteristic for the segment list meeting a threshold for the storage type from the two or more storage types. The method stores the value for the segment list in storage, wherein the value is stored based on the storage type.

Efficient storage for segment store

The present invention relates to the field of semiconductor manufacturing technology, more particularly to a swing spray device of a cleaning apparatus and a cleaning method. The swing spray device comprises a spray arm, a spray head and a driving unit. The spray head is connected with the spray arm, and is controlled to swim by the driving unit. The spray head is hinged with the spray arm to form a first hinge joint. The driving unit is an air cylinder; the piston rod of the air cylinder is connected with the spray head. The piston rod is hinged with the spray head to form a second hinge joint. Therefore, the better cleaning effects can be achieved both in the center and the edge of the wafer.

Swing spray device of cleaning apparatus and cleaning method

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Beijing, China

Yanhui Shi