University of Southampton

Yanhao Yu

Masaaki Sakakura

Peter Kazansky

Lei Wang

A method of delivering optical pulses to a substrate comprises directing a focused beam from a source of optical pulses along a propagation direction onto a substrate; moving the substrate relative to the beam in a plane substantially orthogonal to the propagation direction and continuously along a first direction that includes spaced apart row locations on the substrate, and delivering a plurality of optical pulses from source as the beam reaches each row location; and between delivering the optical pulses at consecutive row locations, moving the beam relative to the substrate in one or more successive discrete movements along a second direction in the plane orthogonal to the first direction, to direct the beam to one or more spaced apart column locations on the substrate, and delivering a plurality of optical pulses from the source at each column location.

Method of optical pulse delivery to multiple locations on a substrate

A method of delivering optical energy to a substrate comprises applying a temporal group of optical pulses to a region of the substrate, wherein the temporal group comprises twenty or fewer pulses of a femtosecond pulse duration, arranged as a first subgroup of pulses comprising up to three pulses followed by a second subgroup of pulses comprising the remaining pulses in the temporal group; and wherein energies of the pulses are controlled such that pulses in the first subgroup have a first energy per pulse and pulses in a second subgroup of pulses have a second energy per pulse which is less than the first energy.

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Changchun, China

Yanhao Yu