Sandisk Technologies Inc.

Yangyin Chen

Masaaki Higashitani

Peter Rabkin

Christopher John Petti

Yingda Dong

Chen Wu

Lin Hou

Yukihiro Sakotsubo

Yoichiro Tanaka

Chu-Chen Fu

James K Kai

Rahul Sharangpani

Tanmay Kumar

Jordan Asher Katine

Kun Hou

Guangle Zhou

Yubao Li

A method of forming a bonded assembly includes providing a first semiconductor die containing and first metallic bonding structures and a first dielectric capping layer containing openings and contacting distal horizontal surfaces of the first metallic bonding structures, providing a second semiconductor die containing second metallic bonding structures, disposing the second semiconductor die in contact with the first semiconductor die, and annealing the second semiconductor die in contact with the first semiconductor die such that a metallic material of at least one of the first metallic bonding structures and the second metallic bonding structures expands to fill the openings in the first dielectric capping layer to bond at least a first subset of the first metallic bonding structures to at least a first subset of the second metallic bonding structures.

Bonded assembly including interconnect-level bonding pads and methods of forming the same

A bonded assembly includes a first semiconductor die and a second semiconductor die that are bonded to each other by dielectric-to-dielectric bonding. First conductive via structures vertically extend through the second semiconductor die and a respective subset of the first dielectric material layers in the first semiconductor die, and contact a respective first metal interconnect structure in the first semiconductor die. Second conductive via structures vertically extend through a second substrate and a respective subset of the second dielectric material layers in the second semiconductor die, and contacting a respective second metal interconnect structure in the second semiconductor die. Redistribution metal interconnect structures located over a backside surface of the second substrate electrically connect the first conductive via structures and the second conductive via structures, and provide electrical interconnection between the first semiconductor die and the second semiconductor die.

Bonded assembly including inter-die via structures and methods for making the same

A method of forming a semiconductor structure includes forming first semiconductor devices over a first substrate, forming a first dielectric material layer over the first semiconductor devices, forming vertical recesses in the first dielectric material layer, such that each of the vertical recesses vertically extends from a topmost surface of the first dielectric material layer toward the first substrate, forming silicon nitride material portions in each of the vertical recesses; and locally irradiating a second subset of the silicon nitride material portions with a laser beam. A first subset of the silicon nitride material portions that is not irradiated with the laser beam includes first silicon nitride material portions that apply tensile stress to respective surrounding material portions, and the second subset of the silicon nitride material portions that is irradiated with the laser beam includes second silicon nitride material portions that apply compressive stress to respective surrounding material portions.

Semiconductor die containing silicon nitride stress compensating regions and method for making the same

A nucleation suppression layer including a self-assembly material can be formed on a surface of a bonding dielectric layer without depositing the self-assembly material on physically exposed surfaces of first metal bonding pads of a first semiconductor die. Metallic liners including a second metal can be formed on the physically exposed surfaces of the metal bonding pads without depositing the second metal on the nucleation suppression layer. The first semiconductor die is bonded to a second semiconductor die by inducing metal-to-metal bonding between mating pairs of the first metal bonding pads and second metal bonding pads of the second semiconductor die.

Bonded assembly formed by hybrid wafer bonding using selectively deposited metal liners

A first bonding unit is provided, which includes a first substrate, a first passivation dielectric layer, and first bonding pads. A second bonding unit is provided, which includes a second substrate, a second passivation dielectric layer, and second bonding pads including bonding pillar structures. Solder material portions are formed on physically exposed surfaces of the first bonding pads. The second bonding unit is attached to the first bonding unit by bonding the at least one of the bonding pillar structures to a respective solder material portion.

Interfacial tilt-resistant bonded assembly and methods for forming the same

A semiconductor structure includes a first semiconductor die containing a recesses, and a second semiconductor die which is embedded in the recess in the first semiconductor die and is bonded to the first semiconductor die.

Embedded bonded assembly and method for making the same

A bonded assembly includes a first die containing first bonding pads having sidewalls that are laterally bonded to sidewalls of second bonding pads of a second die.

Bonded assembly containing laterally bonded bonding pads and methods of forming the same

A bonded assembly and a method of forming a bonded assembly includes providing a first semiconductor die including a first substrate, first semiconductor devices, and first bonding pads that are electrically connected to a respective node of the first semiconductor devices, providing a second semiconductor die including a second substrate, second semiconductor devices, and second bonding pads that are electrically connected to a respective node of the second semiconductor devices, forming a dielectric bonding pattern definition layer including bonding pattern definition openings therethrough over the second bonding pads, and bonding the second bonding pads to the first bonding pads, where the first metal pads expand through the bonding pattern definition openings and are bonded to a respective one of the second bonding pads.

Bonded assembly containing a dielectric bonding pattern definition layer and methods of forming the same

A bonded assembly includes a first semiconductor die including a first substrate, first semiconductor devices located on the first substrate, first dielectric material layers located on the first semiconductor devices and embedding first metal interconnect structures, and first through-substrate via structures extending through the first substrate and contacting a respective first metal interconnect structure. Each of the first through-substrate via structures laterally surrounds a respective core cavity that contains a void or a dielectric fill material portion. The bonded assembly includes a second semiconductor die attached to the first semiconductor die, and including a second substrate, second semiconductor devices located on the second substrate, second dielectric material layers located on the second semiconductor devices and embedding second metal interconnect structures, and bonding pad structures electrically connected to a respective one of the second metal interconnect structures and bonded to a respective first through-substrate via structure.

Bonded die assembly containing partially filled through-substrate via structures and methods for making the same

An alternating stack of insulating layers and sacrificial material layers is formed over a substrate. The sacrificial material layers are formed as, or are subsequently replaced with, electrically conductive layers. Memory openings are formed through the alternating stack. A memory film is formed within each memory openings. A silicon-germanium alloy layer including germanium at an atomic concentration less than 25% is deposited within each memory opening. An oxidation process is performed on the silicon-germanium alloy layer. A vertical semiconductor channel including an unoxidized remaining material portion of the silicon-germanium alloy layer is formed, which includes germanium at an atomic concentration greater than 50%.

Three-dimensional memory device including germanium-containing vertical channels and method of making the same

A non-volatile memory system is provided that includes a plurality of NAND strings of non-volatile storage elements, each non-volatile storage element including a control gate, a tunneling layer, a floating gate, and a blocking layer including a ferroelectric material. The tunneling layer is disposed between the control gate and the floating gate, and the floating gate is disposed between the tunneling layer and the blocking layer.

Ferroelectric non-volatile memory

A three-dimensional memory device includes alternating stacks of insulating strips and electrically conductive strips laterally spaced apart among one another by line trenches and a two-dimensional array of memory stack structures and a two-dimensional array of dielectric pillar structures located in the line trenches. Each line trench is filled with laterally alternating sequence of memory stack structures and dielectric pillar structures. Each memory stack structure contains a vertical semiconductor channel, a pair of blocking dielectrics contacting outer sidewalls of the vertical semiconductor channel, a pair of charge storage layers contacting outer sidewalls of the pair of blocking dielectrics, and a pair of tunneling dielectrics contacting outer sidewalls of the pair of charge storage layers.

Three-dimensional flat inverse NAND memory device and method of making the same

A non-volatile storage element is provided that includes a control gate, a blocking layer including a ferroelectric material, a charge storage region, and a tunneling layer. The blocking layer is disposed between the control gate and the charge storage region, and the charge storage region is disposed between the tunneling layer and the blocking layer.

A non-volatile storage element including a control gate, a tunneling layer, a charge storage region, and a blocking layer including a ferroelectric material. The tunneling layer is disposed between the control gate and the charge storage region, and the charge storage region is disposed between the tunneling layer and the blocking layer.

A memory cell is provided that includes a control gate, a tunneling layer, a charge storage region, a blocking layer including a ferroelectric material, a semiconductor channel, and a source region and a drain region each disposed adjacent the semiconductor channel. The tunneling layer is disposed between the control gate and the charge storage region, the charge storage region is disposed between the tunneling layer and the blocking layer, and the blocking layer is disposed above the semiconductor channel.

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Leuven, Belgium

Yangyin Chen