Memsic, Inc.

Analog Devices,inc.

Memsic Semiconductor (tianjin) Co., Ltd.

Aceinna, Inc.

Other

Memsic Semiconductor (wuxi) Co., Ltd.

Yang Zhao

Richard S Payne

Yongyao Cai

Leyue Jiang

Albert M Leung

Haidong Liu

Zongya Li

Yaping Hua

Roger T Howe

Alexander Dribinsky

Theresa A Core

Steven J Sherman

Dong An

Gregory P Pucci

Michael E Rebeschini

Kevin Hin-Leung Chau

Zhengxin Zhao

John R Martin

Adrian P Brokaw

Stephen R Lewis

Jin Liang

Francis Piu Man

Jerome S Marcelino

Thomas O Maginnis

Jong-Ki Lee

Shuo Gu

Nan Jou Pern

Feiming Huang

Ohlan Silpachai

Paul Zavracky

Hanqin Zhou

Mark Laich

Haipeng Ding

Pan Guozhi

Yu Jianping

Piu Francis Man

Bin Li

The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass. The three-axis accelerometer can realize high-precision acceleration detection on three axes with only one proof mass, and in particular, can provide a fully differential detection signal for the Z axis, thereby greatly improving detection precision.

Single proof mass based three-axis accelerometer

A MEMS flow sensor is provided having a micro flow channel etched in a silicon structure composed of two silicon substrates bonded or fused together. A heater and one or more temperature sensors are, in one embodiment, disposed around the perimeter of the flow channel and outside of the channel. In another embodiment, a heater and one or more temperature sensors are respectively disposed outside the flow channel at the top and bottom of the channel. In further embodiments, a heater and one or more temperature sensors are located inside the flow channel on one or more surfaces thereof or around the inside perimeter of the channel. The flow sensors in accordance with the invention are preferably fabricated using wafer scale fabrication techniques.

MEMS flow sensor

Method and apparatus of integrating a three-axis magnetometer and a three-axis accelerometer to provide attitude and heading, calibrated magnetometer and accelerometer data, and angular rate, while removing sensor error sources over time and temperature and to compensate for hard and soft iron distortions of the Earth magnetic field. Filtered accelerometer data are corrected to account for various error sources. The magnetic heading is calculated from a horizontal magnetic field vector transformed from three dimensional Earth's magnetic field vector by using quasi-static roll and pitch angles from the filtered accelerometer data. A first Kalman filter estimates the state vector, based on the principle that the magnitude of local Earth's magnetic field vector is constant, to form hard and soft iron correction matrices. A second Kalman filter estimates a correction matrix of coupled remaining soft iron and the misalignment of the magnetometer and the accelerometer, as the dot product of local Earth's magnetic field vector and a corrected gravitational acceleration vector, at a quasi-static position, is constant. The three dimensional Earth's magnetic field vector is received by removing the hard and soft irons through the soft iron and hard iron correction matrixes.

Method and apparatus for data fusion of a three-axis magnetometer and three axis accelerometer

The present invention provides a MEMS thermal flow sensor or meter for measuring the flow rate of a fluid without need for calibration of the flow sensor for that particular fluid. A response curve is determined by plotting the sensor output voltage against the volume flow rate divided by fluid thermal diffusivity for a calibration fluid of known thermal diffusivity, and storing response curve data in memory. A conversion factor is employed to provide a measure of correct flow rate of an unknown fluid. This conversion factor is derived from the ratio of the thermal time constant of the calibration fluid to the thermal time constant of the measured fluid, the time constants being measured at zero flow. These time constants are stored in memory. This conversion factor in conjunction with the response curve data is utilized by the processor to produce the correct flow rate. The invention also encompasses a method for measuring fluid flow rate of fluids of differing properties without necessity of a separate flow calibration for each fluid.

MEMS thermal flow sensor with compensation for fluid composition

The present disclosure discloses a method for wafer-level chip scale packaged wafer testing. The method comprises: dicing a wafer-level chip scale packaged wafer into a plurality of wafer strips each comprising a plurality of un-diced chip scale packaged devices; fixing the wafer strips onto a plurality of corresponding strip carriers respectively; testing the chip scale packaged devices of the wafer strips fixed onto the strip carriers by a testing equipment; and dicing the tested wafer strips into a plurality of individual chip scale packaged devices. Since the proposed method does not involve loading a multitude of diced chips into sockets one by one, but that a limited number of wafer strips are loaded onto corresponding strip carriers, flow jam is avoided.

Method for wafer-level chip scale package testing

A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.

Monolithic three-axis magnetic field sensor

An integrated calibration system and process for a three-axis (X, Y, Z) accelerometer estimates Z-axis bias, Z-axis bias drift and determines X, Y, and Z-axes error sources based on measurements taken when the accelerometer is static, i.e., sensing only the earth's gravitational acceleration. Optimal on-the-fly error estimates for the three-axis accelerometer are obtained so that the measurements provided by the three-axis accelerometer remain error-free.

System and method for calibrating a three-axis accelerometer

A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.

Z-axis capacitive accelerometer

A device, system, and method for generating location and path-map data for displaying a location and path-map is disclosed. The device includes a first set of sensors for generating a plurality of first data signals with respect to an attitude of an object; a second set of sensors for generating a plurality of second data signals with respect to the attitude of the object; an imaging device for generating a plurality of third data signals that include a most significant feature, which is disposed in at least two images of the imaging device; and at least one processing device that is adapted to calculate a heading direction (bearing) of the device using the plurality of first data signals and the plurality of second data signals; to calculate a distance traveled along the heading direction using the plurality of third data signals; and to translate the calculated heading direction and calculated distance traveled into a leg or portion of a leg of a path-map for visual display on a two- or three-dimensional system.

Location and path-map generation data acquisition and analysis systems

A magnetometer with only a SET operation for initiating a magnetic orientation within a magnetic field sensor based on anisotropic magnetoresistive (AMR) technology. Within the magnetometer, the relative orientations of the respective X, Y and Z axes detectors are maintained by a package in which all detectors are mounted on a single assembly with the Z axis sensor displaced and held orthogonal to the other two sensors by potting material. Shorting bars on respective barber pole structures are provided with a geometry that allows for closer placement of adjacent barber poles to one another. The barber pole structures are deposited in a nested orientation which provides for balanced resistance legs in a Wheatstone bridge construction.

Magnetometer

An ion discharge gyroscope measures rotational motion and linear acceleration by generating symmetrical ion jet streams and measuring respective amounts of the jet streams impinging on detectors located so as to intercept the ion jet streams. The ion jet streams will be diverted by operation of the Coriolis effect and the differences in the amount of each ion jet stream impinging on the detectors is an indication of rotational motion and linear acceleration. In one embodiment, the ion jet streams are heated and the respective temperatures of the detectors are measured. In another embodiment, the amounts of current flowing through each detector, as contributed by the ion jet streams, are measured and used to determine rotation and acceleration.

Ion discharge gyroscope

The use of magnetic field sensing to perform sophisticated command control and data input into a portable device is disclosed. A magnetic field sensor is embedded or fixedly attached to a portable device to measure changes in the magnetic field strength and/or direction accompanying movement, motion or tilt of the device in one-, two- or three-dimensions when the portable device is used to air-write or make gestures.

Magnetic sensor for use with hand-held devices

Devices for providing tri-axial measurements in an x-direction, a y-direction, and a z-direction and methods of their manufacture are disclosed. The devices comprise a leadframe, at least one X- and Y-axis sensor die, at least one integrated circuit, and a Z-axis sensor. The Z-axis sensor is encapsulated in a pre-molding before the leadframe, X- and Y-axis sensor die(s), integrated circuit(s), and the pre-molding are encapsulated to provide a final molding.

Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same

Devices, systems, and methods for controlling a shutter of a still or video camera or cellular telephone, to reduce blurring due to motion of vibrations are disclosed. The control device includes an inertial sensor for measuring acceleration, velocity and/or angular rotation and for providing data therefrom and a controller for calculating an acceleration amplitude and frequency for predicting the time between acceleration maximums. The controller opens and closes the camera shutter at a time corresponding to the predicted time between maximum accelerations as measured from a real-time acceleration maximum, negating the need for post-imaging correction.

Devices, systems, and methods for controlling a shutter

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Andover, MA, United States of America

Yang Zhao