Northwestern University

Western Digital (fremont), Inc.

Yana Qian

Gregory B Olson

Yunfei Li

Ming M Yang

Yanfeng Chen

Yunjun Tang

Paul E Anderson

Damascene processes using physical vapor deposition (PVD) sputter carbon film as a chemical mechanical planarization (CMP) stop layer for forming a magnetic recording head are provided. In one embodiment, one such process includes providing an insulator, removing a portion of the insulator to form a trench within the insulator, depositing a carbon material on first portions of the insulator using a physical vapor deposition process, disposing at least one ferromagnetic material on second portions of the insulator to form a pole including a portion of the ferromagnetic material within the trench, and performing a chemical mechanical planarization on the at least one ferromagnetic material using at least a portion of the carbon material as a stop for the chemical mechanical planarization.

Damascene process using PVD sputter carbon film as CMP stop layer for forming a magnetic recording head

An advanced secondary hardening carburized Ni&#x2014;Co steel achieves an improved case hardness of about 68-69 Rc together with nominal core hardness of about 50 Rc.

Case hardenable nickel-cobalt steel

Growing community of inventors

Sunnyvale, CA, United States of America

Yana Qian