Institute of Nuclear Energy Research, Atomic Energy Council, Executive Yuan

Yan-Zheng Du

Cheng-Chang Hsieh

Chi-Fong Ai

Deng-Lain Lin

Hsin-Liang Chen

Ming-Chung Yang

A large-area plasma generating apparatus is disclosed, which includes a reaction chamber; a first electrode disposed in the reaction chamber; a second electrode parallel with the first electrode and disposed in the reaction chamber; and a discharge region formed between the first and second electrodes and a plasma can be formed therein; wherein a travelling wave or a traveling-wave-like electromagnetic field is generated via at least one of the first and second electrodes and travels from one end of the discharge region to its opposite end, so as to uniform the plasma in the discharge region.

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Taoyuan County, Taiwan

Yan-Zheng Du