Taiwan Semiconductor Manufacturing Comp. Ltd.

Yan-Ting Lin

Yee-Chia Yeo

Chien-I Kuo

A method includes forming a plurality of channel layers above a (110)-orientated substrate, the channel layers arranged in a <110> direction normal to a top surface the (110)-orientated substrate and extending in a <10> direction perpendicular to the <110> direction; epitaxial growing a plurality of silicon layers on either side of each of the channel layers; doping the silicon layers with boron; epitaxial growing a plurality of first silicon germanium layers on the silicon layers; forming a gate structure surrounding each of the channel layers.

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Hsinchu County, Taiwan

Yan-Ting Lin