Taiwan Semiconductor Manufacturing Comp. Ltd.

Yan-Han Chen

Jiun-Rong Pai

Hsu-Shui Liu

Cheng-Kang Hu

Feng-Kuang Wu

Shou-Wen Kuo

Cheng-Hung Chen

Ren-Hau Wu

An apparatus for handling semiconductor part carriers includes: a mechanical arm and an imaging system coupled to the mechanical arm, wherein the mechanical arm is configured for holding a semiconductor part carrier, and the imaging system is configured for automatically locating a goal position on a surface onto which the semiconductor part carrier is to be placed.

Apparatus and methods for handling semiconductor part carriers

In an embodiment a system includes: an automated vehicle configured to traverse a first predetermined path; and a sensor system located on the automated vehicle, the sensor system configured to detect a vertical obstacle along the first predetermined path along one or two floorboards ahead of the automated vehicle, wherein the automated vehicle is configured to traverse a second predetermined path in response to detecting the vertical obstacle.

Systems and methods for raised floor automated sensor vehicles

A method for positioning a mobile device relative to a stationary device in a semiconductor manufacturing environment is disclosed. The method includes detecting a target affixed to the stationary device at a target location, wherein the target location corresponds to a location of the target relative to a reference point on the stationary device, determining a first position coordinate offset value based upon detecting the target, and moving the mobile device, using the first position coordinate offset value, relative to train the mobile device to move relative to the stationary device for the stationary device to performing a semiconductor manufacturing operation.

Device positioning using sensors

Growing community of inventors

Hsinchu, Taiwan

Yan-Han Chen