Fujibo Holdings, Inc.

Yamato Takamizawa

Ryuma Matsuoka

Satsuki Narushima

Hiroshi Kurihara

Teppei Tateno

Yoshihide Kawamura

Keisuke Ochi

Tetsuaki Kawasaki

A polishing pad contains: a polishing layer having a polishing surface for polishing a workpiece; and a cushion layer disposed on the side of the polishing layer opposite from the polishing surface. With regard to the ratio (tan δ) of the storage elastic modulus E' to the loss elastic modulus E″ of the whole polishing pad, as obtained through dynamic viscoelasticity measurement using frequency dispersion (25° C.) in a bending mode, the ratio of the maximum value of tan δ measured at 100-1000 rad/s (tan δ) to the maximum value of tan δ measured at 1 to 10 rad/s (tan δ) is 0.75 to 1.30.

Polishing pad

A polishing pad is equipped with a polishing layer having a polyurethane sheet, wherein a tan δ peak value change rate determined by formula: tan δ peak value change rate=|tan δ peak−tan δ peak|/tan δ peak×100, is not more than 15%, where tan δ peakrepresents the peak value of the loss tangent tan δ, of the polyurethane sheet in a wet state after being immersed in water for three days, within a temperature range of 20-100° C. in a tensile mode under an initial load of 148 g with a strain range of 0.1% at a measurement frequency of 1.6 Hz, and tan δ peakrepresents the peak value of the loss tangent tan δ, of the polyurethane sheet in a dry state without being immersed in water, within a temperature range of 20-100° C. in a tensile mode under an initial load of 148 g with a strain range of 0.1% at a measurement frequency of 1.6 Hz.

Polishing pad and method for manufacturing same

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Saijo, Japan

Yamato Takamizawa