Samsung Electronics Co., Ltd.

Yamada Satoru

Sung-Hwan Kim

Young-Yong Byun

Hyun-Ho Park

A word line driving circuit includes an address decoding signal generating unit and a word line voltage supply unit. The address decoding signal generating unit includes inverter chain receiving and delaying a first address decoding signal and outputting the delayed first address decoding signal. The word line voltage supply unit includes a pull-up driver that supplies the delayed first address signal to a selected word line in response to a second address decoding signal. The inverter chain includes an NMOS transistor outputting the delayed first address signal and a source terminal of the NMOS transistor receives a set voltage that is higher than a ground voltage and lower than a high voltage.

Word line driving circuit and method

Methods of manufacturing a semiconductor device include forming a gate electrode on a semiconductor substrate, forming spacers on side walls of the gate electrode, and doping impurities into the semiconductor substrate on both sides of the spacers to form highly doped impurity regions. The spacers are selectively etched to expose portions of the semiconductor substrate, and more lightly doped impurity regions are formed in the semiconductor substrate between the highly doped impurity regions and the gate electrode.

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Seould, South Korea

Yamada Satoru