Alliance Fiber Optic Products, Inc.

Kla Tencor Corporation

Yale Zhang

Scott Allen Young

Yuqiao Liu

Wei-Shin Tsay

Aviv Balan

Daniel L Cavan

Lin T Wang

A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.

Active planar autofocus

Optical devices for adding/dropping an optical signal with a particular wavelength are disclosed. According to embodiment, a reflection channel module including a grin lens and a bandpass filter is employed to transmit the optical with a particular wavelength and reflect all other channel signals. The transmitted signal is regulated by an optical regulator (e.g. variable optical attenuator) before it is output from the device via a grin lens. As a result, a regulated channel can be dropped or added depending on an application.

Variable attenuator optical add/drop devices

The inventions invention relates to a generic re-configurable WDM optical cross connection device which may be viewed as an optical network element comprising transport interfaces optionally along with tributary interfaces. An switch system includes a plurality of switch modules each essentially including a pair of R-channel input collimators on one side and a pair of R-channel output collimators on the other side with a switching prism moveably positioned therebetween in an existence/active or non-existence/inactive manner. A pair of input fibers are respectively connected to the two input collimators and an pair of output fibers are respectively connected t the two output collimators. A plurality of jumper fibers cascading said switch modules together.

Optical switch system

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Sunnyvale, CA, United States of America

Yale Zhang