Chinese Academy of Sciences

Shanghia Huali Microelectronics Corporation

Yadan Zhu

Jun Zhou

Rui Li

Xiaolei Zhu

Weibiao Chen

Jiqiao Liu

Xiuhua Ma

Xia Hou

Huaguo Zang

A laser radar system apparatus for the multi-wavelength measurement of the atmospheric carbon dioxide concentration and a vertical aerosol profile, including: a laser transmitting unit; a dual-pulse laser capable of simultaneously transmitting laser having three wavelengths, i.e., 1572 nm, 1064 nm, and 532 nm; a transmitting beam expander; a receiving telescope system; a visual axis monitoring module; a photoelectric detection unit; and a data acquisition and processing unit. The laser that simultaneously outputs laser having three wavelengths is used in a laser radar system, and an optical differential absorption method and a high spectral resolution detection method are used, such that the atmospheric carbon dioxide concentration and the vertical aerosol profile can be measured simultaneously and high-precision aerosol monitoring is implemented during the high-precision obtaining of the concentration of the greenhouse gas carbon dioxide.

Laser radar system apparatus for multi-wavelength measurement of atmospheric carbon dioxide concentration and vertical aerosol profile

The present invention discloses a method of reducing contamination in a CVD chamber. The method comprises cleaning the CVD chamber with first cleaning gases containing NF; removing the particles in the CVD chamber with second cleaning gases containing N; further removing the particles in the CVD chamber with third cleaning gases containing O; and seasoning an amorphous carbon layer with mixed gases containing CHand an inert gas.

Method of reducing contamination in CVD chamber

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Shanghai, China

Yadan Zhu