University of California

Ya-Mei Chen

Gilbert Allan Hawkins

Michael Alan Marcus

Albert P Pisano

Rajesh Vinodrai Mehta

Matthew A Hopcroft

Michael Stephen Sheppy

Piezoelectric actuators are provided. In some instances, the piezoelectric actuators are high-precision piezoelectric actuators. The piezoelectric beams may have a bi-chevron configuration. Also provided are methods of making the piezoelectric actuators, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the piezoelectric actuators, e.g., as valves in fluid dispensing systems.

Growing community of inventors

Berkeley, CA, United States of America

Ya-Mei Chen