Taiwan Carbon Nano Technology Corporation

Ya-Han Wu

Chun-Hsien Tsai

Chun-Jung Tsai

Ting-Chuan Lee

Chia-Hung Li

Ching-Tung Hsu

Yu-Hsuan Liao

Jui-Yu Jao

Wen-Hui Liu

Fang-Song Tsai

A method for manufacturing a gas detector by a micro-electrical-mechanical systems (MEMS) process. The method includes providing a MEMS wafer including a plurality of mutually adjacent units; forming a gas sensing material layer on the MEMS wafer; bonding a structure reinforcing layer and the MEMS wafer through anode bonding; providing an adhesive tape; performing a cutting process to form a gas detection unit; and adhering the gas detection unit on a substrate by the adhesive tape to form a gas detector. The structure reinforcing layer is capable of enhancing the strength of a device and preventing edge collapsing, and hence enhancing the overall yield rate and reducing costs.

Method for manufacturing gas detector by MEMS process

A method for fabricating a catalytic 3-dimensional network material comprises steps: mixing an aqueous solvent with a nitrogen-containing carbon material whose surface is doped with nitrogen atoms to form a first dispersion liquid, and mixing the first dispersion liquid with ammonium carboxymethyl cellulose to form a first gel; undertaking a freeze-drying process of the first gel to remove water from the first gel to form a first product; and undertaking a low-temperature heating process of the first product at a temperature of 50-380&#xb0; C. to cure the first product into a 3D network material doped with nitrogen atoms. The catalytic 3D network material of the present invention has a very high specific surface area to increase the catalytic efficiency.

Method for fabricating catalytic 3D network material

Growing community of inventors

Miaoli County, Taiwan

Ya-Han Wu