Taiwan Semiconductor Manufacturing Comp. Ltd.

Ya-Chieh Wen

Jiun-Rong Pai

Hsu-Shui Liu

Cheng-Kang Hu

Yin Yuan Chen

A method of removing a particle from a pellicle includes moving a nozzle over a surface of a membrane of the pellicle to a location of the particle. A droplet of a liquid material is dispensed from the nozzle to cover the particle on the surface of the membrane. A contact of the droplet with the nozzle is monitored and maintained. The droplet carrying the particle is horizontally dragged along the surface of the membrane toward an edge thereof by the nozzle using the surface tension of the droplet. The droplet carrying the particle is sucked off from the edge of the membrane by a vacuum pump, thereby automatically and safely removing the particle without damaging the pellicle.

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Hsinchu, Taiwan

Ya-Chieh Wen