Zhejiang University

Xufei Zhang

Jie Zhou

Wen He

Shushi Jia

ShuShi Jia

The three-dimensional standard vibrator based on the aerostatic gas-floating decoupling device contains a base. The base is installed with a X axis vibrator, a X axis return mechanism, a Y axis vibrator, a Y axis return mechanism, a Z axis vibrator, and a three-dimensional vibration platform. The X axis vibrator and the X axis return mechanism are both installed along X axis but separated by the three-dimensional vibration platform. The Y axis vibrator and the Y axis return mechanism are both installed along Y axis but also separated by the three-dimensional vibration platform. There are two aerostatic gas-floating plates corresponding to the vibrator and connecting to the X axis and Y axis vibrators, respectively. Two intervals used to generate gas films are formed between the two aerostatic gas-floating plates and the three-dimensional vibrator, respectively. The X axis and Y axis return mechanisms both consist of a reset spring and an aerostatic gas-floating plate corresponding to the spring. The Z axis vibrator is connected with the Z axis aerostatic gas-floating decoupling device. There are intervals used to form gas films between the Z axis aerostatic gas-floating decoupling device and the three-dimensional vibration platform. The present invention contains the advantages of high loading capacity, supporting stability and uniformity.

Three-dimensional standard vibrator based on aerostatic gas-floating decoupling device

The three-dimensional standard vibrator based on leaf-spring-type decoupling device contains a base set with three single-dimensional vibrators (along X, Y and Z axes, respectively) and a three-dimensional vibration platform. The X axis vibrator is connected with the three-dimensional vibration platform through X axis decoupling device, the Y axis vibrator is connected with the three-dimensional vibration platform through Y axis decoupling device, and the Z axis vibrator is connected with the three-dimensional vibration platform through Z axis decoupling device. The properties of the three-dimensional vibrator are as follow. X axis decoupling device, Y axis decoupling device and Z axis decoupling device are all comprised of supporting-spring units. Each of the supporting-spring units contains a pair of leaf springs mounted parallel with each other and the first and second connecting components mounted on the two edges of the leaf springs.

Growing community of inventors

Zhejiang, China

Xufei Zhang