Xerox Corporation

Xueyuan Liu

Yao Rong Wang

Peter M Gulvin

Kristine A German

Pinyen Lin

Joel A Kubby

Jun Ma

Kathleen A Feinberg

An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

Waveguide shuttle MEMS variable optical attenuator

An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

Cantilever beam MEMS variable optical attenuator

First and second ridge type photonic waveguides are provided. Each of the waveguides includes a core layer and a reflective cladding layer in continuous contact with a first side of a core layer. The core layer has a core index of the refraction and is formed in a ridge in a dimension and shape to impose lateral confinement. The reflective cladding layer has an index of refraction that is substantially different than the core index of refraction. An inter-waveguide slab portion is provided between the first and second waveguides. A substrate supports the first and second waveguides, the slab portion, and the reflective cladding layer. A light interceptor region is provided to hinder a transfer of photons between the first and second waveguides through the inter-waveguides slab portion. The light interceptor region may include a trench region, which is an air gap in one embodiment.

Decreased crosstalk in adjacent photonic waveguides

A waveguide structure has a base having a base height (h) above a substrate and a rectangular waveguide having a waveguide height (H) above the substrate and a waveguide width (W) between opposing sides of the waveguide.

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Webster, NY, United States of America

Xueyuan Liu