Chinese Academy of Sciences

Xuefu Zhang

Xiaoming Xie

Mianheng Jiang

Haomin Wang

Tianru Wu

Guangyuan Lu

Chao Yang

Hong Xie

Shujie Tang

Guqiao Ding

Da Jiang

The present disclosure provides a local carbon-supply device and a method for preparing a wafer-level graphene single crystal by local carbon supply. The method includes: providing the local carbon-supply device; preparing a nickel-copper alloy substrate, placing the nickel-copper alloy substrate in the local carbon-supply device; placing the local carbon-supply device provided with the nickel-copper alloy substrate in a chamber of a chemical vapor-phase deposition system, and introducing a gaseous carbon source into the local carbon-supply device to grow the graphene single crystal on the nickel-copper alloy substrate. A graphene prepared by embodiments of the present disclosure has the advantages of good crystallinity of a crystal domain, simple preparation condition, low cost, a wider window of condition parameters required for growth, and good repeatability, which lays a foundation for wide application of the wafer-level graphene single crystal in a graphene apparatus and other fields.

Local carbon-supply device and method for preparing wafer-level graphene single crystal by local carbon supply

The present invention provides a growth method of grapheme, which at least comprises the following steps: S: providing an insulating substrate, placing the insulating substrate in a growth chamber; S: heating the insulating substrate to a preset temperature, and introducing a gas containing catalytic element into the growth chamber; S: feeding carbon source into the growth chamber and growing a graphene thin film on the insulating substrate. The present invention adopts a catalytic manner of introducing catalytic element, and rapid grows a high quality graphene on the insulating substrate, which avoids the transition process of the graphene, enables to improve the production yield of the graphene, reduces the growth cost of the graphene, and thus the mass production can be facilitated. The graphene grown by the present invention may be applied in the field of novel graphene electronic devices, graphene transparent conducting film, transparent conducting coating and the like.

Growth method of graphene

Growing community of inventors

Shanghai, China

Xuefu Zhang