New Sonic Technologies, LLC

Xudong He

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An electrode structure of a resonator and a fabrication method for the electrode structure of the resonator are provided. The electrode structure includes a piezoelectric layer. An electrode metal layer, a dielectric layer, a protrusion/frame metal layer and an etching passivation layer are sequentially arranged above the piezoelectric layer. An air gap is formed between the dielectric layer and the protrusion/frame metal layer, and the air gap is located at an electrode edge. Through the air gap between the dielectric layer and the protrusion/frame metal layer above the piezoelectric layer, an electrode protrusion/frame structure of the resonator with an edge air gap is formed, which serves as an electrode part. When the resonator is working, through the air gap, a transverse sound wave can be reflected back to the resonator and be bound in a resonator body. This greatly increases the Q factor and working performance of the resonator.

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Shenzhen, China

Xudong He